双层电阻栅SOI应变计的设计及其在煤矿的应用

基金项目:

国家自然科学基金青年基金项目（51304115）

中国煤炭科工集团科技创新基金重点资助项目（2013ZD002）

天地科技技术创新基金项目（KJ-2015-TDKC-02）

天地科技开采青年创新基金项目（KJ-2015-TDKC-12）

详细信息

Design of double layer resistance gird SOI strainometer and its application in coal mine

1.
Coal Mining and Designing Department, Tiandi Science and Technology Co.,Ltd.,Beijing 100013, China
2.
School of Information Science and Technology, Fudan University, Shanghai 200433, China

摘要: 设计了一种微熔结构的双层电阻栅SOI应变计，该应变计利用热生长氧化、光刻、刻蚀等工艺方法进行制作，解决了通常SOI应变计体电阻阻值小、易受污染的问题，提高了应变计的精度、绝缘性和工作稳定性。现场试验结果表明，利用该应变计制作的煤矿钻孔应力计测量数据准确，工作稳定可靠，适用于煤岩体应力监测。
- 煤炭开采 /
- 双层电阻栅 /
- SOI应变计 /
- 钻孔应力计
Abstract: A double layer resistance gird SOI strainometer with micro fuse structure was designed. The strainometer is produced by techniques of thermally grown oxide, photoetching and mechanical erosion. It solves problems of normal SOI strainometer which has small bulk resistor and is vulnerable to pollution, and improves precision, insulativity and working stability of the strainometer. Field test results show that mine borehole stressmeter adopting the proposed SOI strainometer has high measuring accuracy and stable and reliable performance,and is suitable for stress monitoring of coal and rock mass.
- coal mining /
- double layer resistance gird /
- SOI strainometer /
- borehole stressmeter