基于MEMS技术的载体催化甲烷检测元件制作方法

基金项目:

重庆市煤监局煤炭发展专项资金资助项目（渝煤〔2014〕-kj-09）

中国煤炭科工集团有限公司科技创新基金面上项目（2014MS025）

详细信息

Product process of carrier catalytic methane detection component based on MEMS technology

摘要: 在分析载体催化甲烷检测原理的基础上，提出采用先进的微机电系统（Microelectro Mechanical System，MEMS）技术对传统载体催化甲烷检测元件的制作方法进行改进，给出了具体的元件制作流程，并对元件的性能进行了测试。测试结果表明，基于MEMS技术的载体催化甲烷检测元件较传统载体催化甲烷检测元件在功耗、抗中毒、一致性等方面有明显改善。
- 甲烷检测 /
- 载体催化检测 /
- 微机电系统 /
- MEMS
Abstract: Based on analysis of carrier catalyst methane detecting principle, advanced microelectro mechanical system(MEMS) technology was proposed to improve product process of traditional carrier catalytic methane detection components and the specific product process was introduced. Performance of component p produced by MEMS was tested. The results show that the carrier catalytic methane detection component based on MEMS technology has obvious improvements in size, power consumption, anti-toxic and consistency than the traditional ones.
- methane detection /
- carrier catalytic detection /
- microelectro mechanical system /
- MEMS

1.	梁毅勇. 矿井主通风机轴承故障机理分析及诊断方法研究. 能源与环保. 2021(02): 105-108+113 . 百度学术
2.	崔红芳，程凤林. 基于改进模糊推理理论的矿井主通风机故障诊断. 煤炭技术. 2021(10): 112-115 . 百度学术