微纳甲烷传感技术的研究

基金项目:

“十二五”国家科技支撑计划资助项目（2012BAH12B01）

详细信息

Research of mico/nano methane sensing technology

1.
IoT Perception Mine Research Center, China University of Mining and Technology, Xuzhou 221008, China
2.
State and Local Joint Engineering Laboratory of Perception Mine, China University of Mining an

摘要: 针对矿山物联网发展对甲烷传感器低功耗、微型化、低成本的设计要求，对一种基于微纳米技术的载体催化燃烧式甲烷传感器展开研究，着重介绍了该种甲烷传感器的微加热器及低维甲烷传感方面的研究现状及相应成果，并介绍了一种新型金属-绝缘体-金属结构的金属氧化物半导体甲烷传感器。该种甲烷传感器具有功耗低、体积小等特点，符合矿山物联网的发展需求。
Abstract: For design requests of low power consumption, miniaturization and low cost about methane sensor because of development of mine Internet of things, a carrier catalytic combustion type methane sensor based on mico/namo meter technology was researched. Existing research status and corresponding achievements of the methane sensor were introduced in details on inspects of microheaters and low- dimensional methane sensing, and a metal oxide semiconductor methane sensor with a new metal-insulator-metal structure was introduced. The methane sensor has characteristics of low power consumption and miniaturization, which meets with development requests of mine Internet of things.
- methane sensor /
- micro/nano meter technology /
- microheater